Electrostatically coupled pressure sensor
AssigneePGS Geophysical AS
InventorsFREDERICK JAMES BARR, Stig Rune Lennart Tenghamn, Anders Göran Mattsson
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Abstract
A disclosed pressure-responsive sensor includes a flexible element contained within an enclosure and a membrane configured to exert an electrostatic force on the flexible element to cause the flexible element to respond to pressure variations on the membrane. A disclosed pressure-sensing method includes electrostatically coupling a membrane to a flexible element contained within an enclosure to transfer a pressure response of the membrane to the flexible element. Motion of the flexible element is converted into a pressure signal.
Claims20
A pressure-responsive sensor comprising:
- a flexible element contained within an enclosure;
- and
- a membrane configured to exert an electrostatic force on the flexible element to cause the flexible element to respond to pressure variations on the membrane.
A pressure-sensing method that comprises:
- electrostatically coupling a membrane to a flexible element contained within an enclosure to transfer a pressure response of the membrane to the flexible element;
- and
- converting motion of the flexible element into an electrical signal.
Dependencies are inferred from the claim text.