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OwnerTom Thuy Ho, Weidong Wang +3inventors
InventorsTom Thuy Ho, Weidong Wang, Woon-Kyu Choi, Ji-Hoon Keith Han, Gabriel Serge Villareal
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Integrated yield/equipment data processing system for collecting and analyzing integrated tool-related data (cause data) and material-related data (effect data) pertaining to at least one material processing tool and at least one material is disclosed. In an embodiment, the tool-related data is correlated with the material-related data, and the correlated tool-related data and material-related data is employed by logic to perform at least one of root-cause analysis, prediction model building and tool control/optimization. By integrating cause-and-effect data in a single platform, the data necessary for performing, for example, automated problem detection (e.g., automated root cause analysis) and prediction, is readily available and correlated, which for example shortens the cycle time to detection and facilitates efficient and timely automated tool management and control.
An integrated yield/equipment data processing system for collecting and analyzing integrated tool-related data and material-related data pertaining to at least one material processing tool and at least one material, comprising:
An integrated yield/equipment data processing system for collecting and analyzing integrated tool-related data and material-related data pertaining to at least one material processing tool and at least one material, comprising:
A method for collecting and analyzing integrated tool-related data and material-related data pertaining to at least one material processing tool and at least one material, said collecting and analyzing utilizing an integrated yield/equipment data processing system, comprising:
Dependencies are inferred from the claim text.