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US 2013/0029157 A1Published application
Method for making a reinforced silicon micromechanical part
AssigneeMontres Breguet S.A.
InventorNakis Karapatis
Life of this patent
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Abstract
A method of fabricating a reinforced silicon micromechanical part includes: micromachining the part, or a batch of parts in a silicon wafer; forming a silicon dioxide layer over the entire surface of the part, in one or plural operations, so as to obtain a thickness of silicon dioxide that is at least five times greater than the thickness of native silicon dioxide; and removing the silicon dioxide layer by etching.
Claims8
1-7. (canceled)
A method of fabricating a reinforced silicon micromechanical part, the method comprising, in order:
- micro-machining the part, or a batch of parts in a silicon wafer;
- forming a silicon dioxide layer over an entire surface of the part, in one or plural operations, so as to obtain a thickness of silicon dioxide that is at least five times greater than the thickness of native silicon dioxide;
- and
- removing the silicon dioxide layer by etching.
1 more element
Dependencies are inferred from the claim text.