Coaxial cable and substrate processing apparatus
AssigneeKabushiki Kaisha Toshiba
InventorsHideo Eto, Nobuyasu Nishiyama, Makoto Saito, Junko Ouchi
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Abstract
According to one embodiment, there is provided a coaxial cable that transmits radio frequency power. The coaxial cable includes an inner tube, an outer tube, and an insulating support member. The inner tube is made of a conductor. The outer tube is disposed outside the inner tube coaxially with the inner tube and is made of a conductor. The insulating support member is disposed between the inner tube and the outer tube. Cooling gas flows into at least one of a first space inside the inner tube and a second space between the inner tube and the outer tube.
Claims20
A coaxial cable that transmits radio frequency power, comprising:
- an inner tube made of a conductor;
- an outer tube disposed outside the inner tube coaxially with the inner tube and made of a conductor;
- and
- an insulating support member disposed between the inner tube and the outer tube,
- wherein cooling gas flows into at least one of a first space inside the inner tube and a second space between the inner tube and the outer tube.
Dependencies are inferred from the claim text.