Device for quantifying the degassing of a piece of equipment arranged in a vacuum chamber
AssigneeThales
InventorAlain Bettacchioli
Life of this patent
Estimating the term…
Abstract
A device for quantifying the degassing of a piece of equipment placed in a vacuum chamber includes a metal blade made from a ferromagnetic material including a fixed end and a free end, the blade being provided with a cooling device and a device for measuring an intrinsic temperature of the blade; an electromagnet for exciting the blade; and a measurement sensor for measuring the excitation of the free end of the blade connected to a device for acquiring measurements and for calculating at least one oscillation frequency of the free end of the blade, the acquisition and calculation device being connected to a device for calculating a surface density of a mass deposited on the blade.
Claims8
A device for quantifying the degassing of a piece of equipment placed in a vacuum chamber, the device comprising:
- a metal blade made from a ferromagnetic material comprising a fixed end and a free end, the blade being provided with a cooling device and a device for measuring an intrinsic temperature of the blade;
- an electromagnet for exciting the blade;
- and
- a measurement sensor for measuring the excitation of the free end of the blade connected to a signal conditioning device comprising a device for acquiring measurements and for calculating at least one oscillation frequency of the free end of the blade, the acquisition and calculation device being connected to a device for calculating a surface density of a mass deposited on the blade.
Dependencies are inferred from the claim text.