Method for making a pyrolytic boron nitride article
OwnerCaixuan XU, Subbanna MANJUNATH +1inventors
InventorsCaixuan XU, Subbanna MANJUNATH, Takayuki TOGAWA
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Abstract
A method for producing a pyrolytic boron nitride (PBN) article comprises introducing a nitrogen containing gas and a boron containing gas into a heated reactor furnace under temperature and pressure conditions sufficient to form a PBN deposit and pulsing the flow of the reactant gases between an on and an off state. The method provides a multi-layered PBN article that exhibits a relatively weak bonding interface between adjacent PBN layers to allow for the layers to be peeled away from one another in a controlled manner.
Claims20
A method of making a PBN article comprising:
- introducing ammonia gas and a boron halide gas into a heated furnace reactor for a first period of time, reacting the ammonia and the boron halide and causing boron nitride to be deposited on a substrate;
- after the first period of time, pulsing the flow of the ammonia gas and the boron halide gas into the reactor between a first pulsed state and a second pulsed state, the first pulsed state comprising discontinuing the flow of at least one of the ammonia gas and the boron halide gas, and the second pulsed state comprising flowing both the ammonia gas and the boron halide gas into the reactor and causing boron nitride to be deposited;
- and
- pulsing between the first pulsed state and the second pulsed state until a PBN article of a desired thickness has been achieved.
A method of forming a PBN article comprising:
- (a) introducing ammonia gas and boron halide gas into a heated reactor furnace and reacting the gases for a first time interval to form a PBN deposit on a substrate;
- (b) discontinuing a flow of the boron halide gas into the reactor for a second time interval;
- and
- (c) repeating steps (a) and (b) until a PBN article of a desired thickness has been achieved.
A PBN article comprising a plurality of PBN layers and a bonding interface layer disposed between adjacent PBN layers, wherein the bonding interface layer is substantially free of a dopant.
A method of testing the peeling performance of a PBN article comprising:
- subjecting a slab of a PBN article to ultrasonic forces for a period of time;
- and
- determining the density of delamination between two or more PBN layers of the PBN article.
Dependencies are inferred from the claim text.