Electron beam drawing apparatus and method of manufacturing device
AssigneeCanon Kabushiki Kaisha
InventorJun ITO
Life of this patent
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Abstract
An electron beam drawing apparatus performs drawing on a substrate with an electron beam emitted by an electron gun. The apparatus includes a conditioning chamber configured to perform conditioning of a spare electrode that is a spare for an electrode which constitutes the electron gun, and a driving mechanism configured to remove a used electrode from the electron gun, and to install, into the electron gun, the spare electrode having been subjected to the conditioning, wherein the conditioning includes supplying of electric power to the spare electrode.
Claims9
An electron beam drawing apparatus which includes an electron gun, and performs drawing on a substrate with an electron beam emitted by the electron gun, the apparatus comprising:
- a conditioning chamber configured to perform conditioning of a spare electrode that is a spare for an electrode which constitutes the electron gun;
- and
- a driving mechanism configured to remove a used electrode from the electron gun, and to install, into the electron gun, the spare electrode having been subjected to the conditioning,
- wherein the conditioning includes supplying of electric power to the spare electrode.
A method of manufacturing a device, the method comprising:
- performing drawing on a substrate using an electron beam drawing apparatus;
- and
- developing the substrate on which the drawing has been performed,
- wherein the electron beam drawing apparatus includes an electron gun, and performs drawing on the substrate with an electron beam emitted by the electron gun, the apparatus comprises
- a conditioning chamber configured to perform conditioning of a spare electrode that is a spare for an electrode which constitutes the electron gun;
- and
- a driving mechanism configured to remove a used electrode from the electron gun, and to install, into the electron gun, the spare electrode having been subjected to the conditioning,
- wherein the conditioning includes supplying of electric power to the spare electrode.
Dependencies are inferred from the claim text.