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AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsRichard J. Hertel, Julian G. Blake, Edward D. MacIntosh, Alexander C. Kontos, Frank Sinclair, Christopher A. Rowland, Mayur Jagtap, Sankar Ganesh Kolappan
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A media carrier, adapted to hold a plurality of pieces of magnetic media, is disclosed. This media carrier can be placed on the workpiece support, or platen, allowing the magnetic media to be processed. In some embodiments, the media carrier is designed such that only one side of the magnetic media is exposed, requiring a robot or other equipment to invert each piece of media in the carrier to process the second side. In other embodiments, the media carrier is designed such that both sides of the magnetic media are exposed. In this scenario, the media carrier is inverted on the platen to allow processing of the second side.
An apparatus adapted to hold a plurality of pieces of media, said media having an inner diameter and an outer diameter, said apparatus used in conjunction with ion implantation equipment, comprising:
An apparatus adapted to hold a plurality of pieces of media, said media having an inner diameter and an outer diameter, said apparatus used in conjunction with ion implantation equipment, comprising a carrier, having a first diameter and a plurality of media holders, wherein each of said media holders comprises:
Dependencies are inferred from the claim text.