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US 2012/0269972 A1Published application
Optically Absorptive Material for Alignment Marks
AssigneeMolecular Imprints, Inc.
InventorsNiyaz Khusnatdinov, Kosta S. Selinidis, Joseph Michael Imhof, Dwayne L. LaBrake
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Abstract
Imprint lithography templates having alignment marks with highly absorptive material. The alignment marks are insensitive to the effects of liquid spreading and can provide stability and increase contrast to alignment system during liquid imprint filling of template features.
Claims16
An imprint template for patterning formable material positioned on a substrate comprising:
- a body having a first side and a second side;
- a mold having a patterned surface, the mold positioned on the first side of the body, the patterned surface having a feature area defining a first pattern;
- a template alignment mark formed in the patterned surface outside of the feature area, the template alignment mark having a plurality of features that include a highly optically absorptive material.
Dependencies are inferred from the claim text.