Fluidized bed reactor
AssigneeSiliconvalue LLC.
InventorsYUNSUB JUNG, KEUNHO KIM, YEOKYUN YOON, TED KIM
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Abstract
A fluidized bed reactor is disclosed. The fluidized bed reactor includes a reaction pipe comprising silicon particles provided therein; a flowing-gas supply unit configured to supply flowing gas to the silicon particles provided in the reaction pipe, the flowing-gas supply unit comprising a flowing-gas inlet and a flowing-gas nozzle; and a reaction gas supply unit configured to supply reaction gas containing silicon elements to the silicon particles, wherein an inlet area of the flowing-gas inlet is identical to or larger than an outlet area of the flowing-gas nozzle.
Claims20
A fluidized bed reactor comprising:
- a reaction pipe comprising silicon particles provided therein;
- a flowing-gas supply unit configured to supply flowing gas to the silicon particles provided in the reaction pipe, the flowing-gas supply unit comprising a flowing-gas inlet and a flowing-gas nozzle;
- and
- a reaction gas supply unit configured to supply reaction gas containing silicon elements to the silicon particles,
- wherein an inlet area of the flowing-gas inlet is identical to or larger than an outlet area of the flowing-gas nozzle.
A fluidized bed reactor comprising:
- a reaction pipe;
- a flowing-gas supply unit configured to independently control supply of flowing gas to an internal space of the reaction pipe;
- and
- a reaction gas supply unit configured to supply reaction gas to the internal space of the reaction pipe.
A fluidized bed reactor comprising:
- a reaction pipe comprising silicon particles provided therein;
- a plurality of flowing-gas nozzles configured to supply flowing gas to an internal space of the reaction pipe;
- a reaction gas supply unit configured to supply reaction gas containing silicon elements to the internal space of the reaction pipe;
- and
- a lower plate assembled with the plurality of the flowing-gas nozzles,
- wherein the plurality of the flowing-gas nozzles are arranged in an overall area of the lower plate uniformly.
Dependencies are inferred from the claim text.