Nano-enhanced evanescence integrated technique (neet) based microphotonic device and sample analysis system
AssigneeValorbec S.E.C.
InventorsMuthukumaran Packirisamy, Arvind Chandrasekaran
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Abstract
A device, a method of fabricating the device and a sample analysis system that includes the device are provided. The device includes an optical waveguide having a plurality of nanofeatures integrated thereon to influence at least one of evanescence and coupling of an optical field of the optical waveguide. The sample analysis system includes a fluidic actuation system for introducing sample specimen fluid into a microfluidic channel of the device for evanescence based detection.
Claims34
A device comprising:
- an optical waveguide having a plurality of nanofeatures integrated thereon to influence at least one of evanescence and coupling of an optical field of the optical waveguide.
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A method of fabricating a device, the method comprising:
- microfabricating an optical waveguide on a semiconductor material platform;
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- microfabricating a plurality of nanofeatures on at least one surface of the optical waveguide to influence at least one of evanescence and coupling of an optical field of the optical waveguide.
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Dependencies are inferred from the claim text.