Resonance nanoelectromechanical systems
AssigneeInternational Business Machines Corporation
InventorsLeland Chang, Michael A. Guillorn, Dechao Guo, Fei Liu, Keith Kwong Hon Wong
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Abstract
Systems and methods for operating a nanometer-scale cantilever beam with a gate electrode. An example system includes a drive circuit coupled to the gate electrode where a drive signal from the circuit may cause the beam to oscillate at or near the beam's resonance frequency. The drive signal includes an AC component, and may include a DC component as well. An alternative example system includes a nanometer-scale cantilever beam, where the beam oscillates to contact a plurality of drain regions.
Claims20
A nanoelectromechanical system (NEMS) comprising:
- a nanometer-scale cantilever beam having a resonance frequency;
- a gate electrode proximate the cantilever beam;
- and
- a drive circuit coupled to the gate electrode, the drive circuit configured to apply a drive signal to the gate electrode, the drive signal including an AC component substantially at the resonance frequency.
A nanoelectromechanical system (NEMS) comprising:
- a plurality of drain regions;
- a nanometer-scale cantilever beam positioned between the plurality of drain regions;
- and
- a gate electrode proximate the cantilever beam.
The nanoelectromechanical system of clam 10, wherein the plurality of drain regions is c-shaped.
A method for operating a nanoelectromechanical system, the nanoelectromechanical system including a nanometer-scale cantilever beam having a resonance frequency, the method comprising:
- applying a drive signal to a gate electrode proximate the cantilever beam, the drive signal including an AC component at or near the resonance frequency.
Dependencies are inferred from the claim text.