Tri wavelength diffraction modulator and a method for modulation

A tri wavelength diffraction modulator, comprising:

• a stationary substrate with a bottom electrode plate formed on top of the stationary substrate;
• a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection anchored onto the stationary substrate;
• and
• a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection anchored onto the stationary substrate,
• wherein the second suspended beam of the second electrode plate comprises a second reflecting layer and a second dielectric layer, at least one micro aperture is opened in the second reflecting layer;
• the stationary substrate further comprises a driving circuitry built inside the stationary substrate, the driving circuitry is adapted to provide electrical charge to the bottom electrode, the first electrode plate and the second electrode plate respectively, so as to remain a relax distance, a pull-close distance and a pull-apart distance between the first suspended beam and the second suspended beam respectively within different time durations;
• the pull-close distance is adapted to make illumination of a first wavelength in incident illumination passing through the micro aperture form diffraction, the relax distance is adapted to make illumination of a second wavelength in incident illumination form diffraction, and the pull-apart distance is adapted to make illumination of a third wavelength in incident illumination form diffraction.