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US 2012/0268738 A1Published application
Construction of Reference Spectra with Variations in Environmental Effects
AssigneeApplied Materials, Inc.
InventorJeffrey Drue David
Life of this patent
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Abstract
A method of generating a library of reference spectra includes storing at least one reference spectrum, storing a plurality of different transmission curves, and for at least two transmission curves from the plurality of different transmission curves, calculating a modified reference spectrum from the reference spectrum and the transmission curve to generate a plurality of modified reference spectra. The transmission curves represent distortion to a spectrum introduced by variations in components in an optical path before a substrate surface.
Claims21
A method of generating a library of reference spectra, comprising:
- storing at least one reference spectrum;
- storing a plurality of different transmission curves, the transmission curves representing distortion to a spectrum introduced by variations in components in an optical path before a substrate surface;
- for at least two transmission curves from the plurality of different transmission curves, calculating a modified reference spectrum from the reference spectrum and the transmission curve to generate a plurality of modified reference spectra.
Dependencies are inferred from the claim text.