Contact structure and semiconductor device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShunpei YAMAZAKI
Life of this patent
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Abstract
To improve the reliability of contact with an anisotropic conductive film in a semiconductor device such as a liquid crystal display panel, a terminal portion of a connecting wiring on an active matrix substrate is electrically connected to an FPC by an anisotropic conductive film. The connecting wiring is made of a lamination film of a metallic film and a transparent conductive film. In the connecting portion with the anisotropic conductive film, a side surface of the connecting wiring is covered with a protecting film made of an insulating material, thereby exposure to air of the metallic film can be avoided.
Claims59
A display device comprising:
- a substrate;
- a connecting wiring over the substrate, the connecting wiring comprising:
- a metallic film;
- and
- a transparent conductive film on and in contact with the metallic film;
- an organic insulating film thicker than the connecting wiring, in direct contact with a side surface of a terminal portion of the metallic film and over a peripheral portion of the terminal portion of the metallic film;
- an anisotropic conductive film on and in direct contact with the transparent conductive film over the terminal portion of the metallic film;
- and
- a touch panel over the substrate.
A display device comprising:
- a substrate;
- a connecting wiring over the substrate, the connecting wiring comprising:
- a metallic film;
- and
- a transparent conductive film on and in contact with the metallic film;
- an organic insulating film thicker than the connecting wiring, in direct contact with a side surface of a terminal portion of the metallic film and over a peripheral portion of the terminal portion of the metallic film;
- an anisotropic conductive film on and in direct contact with the transparent conductive film over the terminal portion of the metallic film;
- a touch panel over the substrate;
- and
- an opposing substrate over the substrate, a liquid crystal material and a columnar spacer being interposed between the substrate and the opposing substrate.
A display device comprising:
- a substrate;
- a connecting wiring over the substrate, the connecting wiring comprising:
- a metallic film;
- and
- a transparent conductive film on and in contact with the metallic film;
- an inorganic insulating film comprising a portion in direct contact with a side surface of a terminal portion of the metallic film;
- an organic insulating film thicker than the connecting wiring and covering the portion of the inorganic insulating film;
- an anisotropic conductive film on and in direct contact with the transparent conductive film over the terminal portion of the metallic film;
- and
- a touch panel over the substrate.
A display device comprising:
- a substrate;
- a transistor formed on the substrate;
- an inorganic insulating film over the transistor;
- an organic insulating film over the inorganic insulating film;
- a connecting wiring over the substrate, the connecting wiring comprising:
- a metallic film;
- and
- a transparent conductive film on and in contact with the metallic film;
- wherein the inorganic insulating film comprises a portion in direct contact with a side surface of a terminal portion of the metallic film;
- wherein the organic insulating film is thicker than the connecting wiring and covers the portion of the inorganic insulating film;
- an anisotropic conductive film on and in direct contact with the transparent conductive film over the terminal portion of the metallic film;
- and
- a touch panel over the substrate.
A display device comprising:
- a substrate;
- a connecting wiring over the substrate, the connecting wiring comprising:
- a metallic film;
- and
- a transparent conductive film on and in contact with the metallic film;
- an inorganic insulating film comprising a portion in direct contact with a side surface of a terminal portion of the metallic film;
- an organic insulating film thicker than the connecting wiring and covering the portion of the inorganic insulating film;
- an anisotropic conductive film on and in direct contact with the transparent conductive film over the terminal portion of the metallic film;
- a touch panel over the substrate;
- and
- an opposing substrate over the substrate, a liquid crystal material and a columnar spacer being interposed between the substrate and the opposing substrate.
A display device comprising:
- a substrate;
- a transistor formed on the substrate;
- an inorganic insulating film over the transistor;
- an organic insulating film over the inorganic insulating film;
- a connecting wiring over the substrate, the connecting wiring comprising:
- a metallic film;
- and
- a transparent conductive film on and in contact with the metallic film;
- wherein the inorganic insulating film comprises a portion in direct contact with a side surface of a terminal portion of the metallic film;
- wherein the organic insulating film is thicker than the connecting wiring and covers the portion of the inorganic insulating film;
- an anisotropic conductive film on and in direct contact with the transparent conductive film over the terminal portion of the metallic film;
- a touch panel over the substrate;
- and
- an opposing substrate over the substrate, a liquid crystal material and a columnar spacer being interposed between the substrate and the opposing substrate.
Dependencies are inferred from the claim text.