Back to results
US 2012/0268533 A1Published application
Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsTomohiro SAKAI, Koichi MOROZUMI
Life of this patent
Estimating the term…
Abstract
A piezoelectric element comprises a first electrode including platinum, a piezoelectric layer disposed above the first electrode, made of a complex oxide having a perovskite structure containing at least bismuth, and a second electrode disposed above the piezoelectric layer. An oxide containing bismuth and platinum is disposed at the interface of the piezoelectric layer with the first electrode.
Claims7
A piezoelectric element comprising:
- a first electrode including platinum;
- a piezoelectric layer disposed above the first electrode, made of a complex oxide having a perovskite structure containing at least bismuth;
- and
- a second electrode disposed above the piezoelectric layer,
- wherein an oxide containing bismuth and platinum is disposed at the interface of the piezoelectric layer with the first electrode.
2 more elements
Dependencies are inferred from the claim text.