Stackable probe system
OwnerLi-Cheng Richard ZAI, Ben Lih-Chung CHIAinventors
Life of this patent
Estimating the term…
Abstract
A probe system includes a plurality of spaced apart height-variable legs, each of which is composed of a stack of blocks magnetically attached to each other, a platen bridging and magnetically secured to the legs, and a probe positioner magnetically attached to the platen. The probe positioner includes an xyz-axes position adjuster mounted on the platen and connected to a first link, a first ball joint interconnecting the first link and a second link, a rotary connector interconnecting the second link and a third link, and a second ball joint connecting the third link to a chuck unit for holding a probe.
Claims20
A probe system comprising:
- a plurality of spaced apart height-variable legs, each of which is composed of a stack of blocks magnetically attached to each other;
- a platen bridging and magnetically secured to the tops of said legs;
- and
- a probe positioner magnetically attached to the top of said platen.
A probe system comprising:
- a support;
- an xyz-axes position adjuster mounted on said support and capable of making linear movements relative to said support along directions of x-axis, y-axis and z-axis;
- a first link having one end connected to said xyz-axes position adjuster;
- a second link;
- a first ball joint connected between one end of said second link and the other end of said first link;
- a third link;
- a chuck unit adapted to hold a probe;
- a second ball joint connected between said chuck unit and one end of said third link;
- and
- a rotary connector connected rotatably to the other end of said second link and to the other end of said third link.
A probe system comprising:
- a support;
- a chuck unit adapted to hold a probe;
- a first link mounted on said support;
- a second link;
- a first ball joint having a first ball disposed on one end of said first link, and a first ball socket disposed on one end of said second link and receiving said first ball;
- a third link;
- a second ball joint having a second ball disposed on said chuck unit, and a second ball socket disposed on one end of said third link and receiving said second ball;
- a first sleeve disposed on the other end of said second link and having a first sleeve hole;
- a second sleeve disposed on the other end of said third link and having a second sleeve hole aligned with said first sleeve hole;
- two pusher rods, one of which extends through said second link from said first ball socket and into said first sleeve hole, and the other of which extends through said third link from said second ball socket and into said second sleeve hole;
- a first press member inserted movably into one of said first and second link sleeve holes and having a first cam face to contact one of said pusher rods;
- a second press member inserted movably into the other one of said first and second link sleeve holes and having a second cam face to contact the other one of said pusher rods;
- a tightening screw rod connected to said second press member and extending through said first press member and said one of said first and second sleeve holes;
- and
- a connector tightening knob disposed around said tightening screw rod at one side of said first press member opposite to said second press member and having a threaded hole threadedly engaging said tightening screw rod;
- wherein, when said connector tightening knob is rotated relative to said tightening screw rod to move said first press member toward said second press member, said first and second cam faces respectively press said pusher rods, said pusher rods respectively press said first and second balls, and said first and second sleeves are immobilized relative to each other.
Dependencies are inferred from the claim text.