Inductively-Coupled Plasma Device
AssigneeTyco Healthcare Group LP
InventorJAMES A. GILBERT
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Abstract
A plasma device configured to receive ionizable media is disclosed. The plasma device includes a first pair of dielectric substrates each having an inner surface and an outer surface. The first pair of dielectric substrates is disposed in spaced, parallel relation relative to one another with the inner surfaces thereof facing one another. The device also includes a first pair of spiral coils each disposed on the inner surface of the dielectric substrates. The first pair of spiral coils is configured to couple to a power source and configured to inductively couple to an ionizable media passed therebetween to ignite the ionizable media to form a plasma effluent.
Claims20
A plasma device configured to receive ionizable media, comprising:
- a first pair of spiral coils disposed in spaced, parallel relation relative to one another and defining a first opening therethrough, wherein the first pair of spiral coils is configured to couple to a power source and configured to inductively couple to an ionizable media passed through the first opening to ignite the ionizable media to form a plasma effluent.
A plasma device configured to receive ionizable media, comprising:
- a first pair of spiral coils disposed in spaced, parallel relation relative to one another and defining a first opening therethrough;
- and
- a second pair of spiral coils disposed in spaced, parallel relation relative to one another and transverse relation relative to the first pair of spiral coils, wherein the first and second pairs of spiral coils are configured to couple to a power source and configured to inductively couple to an ionizable media passed through the first opening to ignite the ionizable media to form a plasma effluent.
A plasma system, comprising:
- a plasma device comprising a first pair of spiral coils disposed in spaced, parallel relation relative to one another and defining a first opening therethrough;
- an ionizable media source coupled to the plasma device and configured to supply ionizable media between the first pair of dielectric substrates;
- and
- a power source coupled to the first pair of spiral coils, wherein the first pair of spiral coils is configured to inductively couple to an ionizable media passed through the first opening to ignite the ionizable media to form a plasma effluent.
Dependencies are inferred from the claim text.