Mesh structure for surface plasmon resonance spectroscopy
AssigneeSonopress GmbH
InventorBenno Steinbrecht
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Abstract
The invention relates to producing a profiled mesh structure on a substrate for use in surface plasmon resonance spectroscopy, wherein a flat board is coated with a positive photoresist, the photoresist is illuminated in parallel tracks corresponding to the mesh constant, subsequently developed, and the development interrupted before the development process reaches the surface of the board. After metallizing and galvanically molding the developed and rinsed surface profile, a matrix is available allowing low-cost molding of the substrate from a thermoplastic material.
Claims19
A method for producing a grating structure having an approximately sinusoidal profile on the surface of a substrate for use for surface plasmon resonance spectroscopy, comprising the steps:
- (a) Coating a flat plate with a positive photoresist,
- (b) Exposing the photoresist with a laser beam in at least approximately parallel tracks microscopically with a track spacing equal to a predetermined value of the grating constant and a diffraction-limited track width of approximately half of the track spacing,
- (c) Developing the exposed photoresist by means of a developer liquid,
- (d) Terminating the developing by rinsing before the developing process reaches the surface of the plate,
- (e) Metallizing the surface profile thereby created,
- (f) Making an impression of a template,
- (g) Producing the substrate from a thermoplastic material by taking an impression of the template.
Dependencies are inferred from the claim text.