US 2012/0267730 A1Published application

Micro-electromechanical system (mems) device

AssigneeTronics Microsystems S.A.

InventorsStéphane RENARD, Antoine FILIPE, Joël COLLET, François-Xavier BOILLOT

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Abstract

A micro-electromechanical system (MEMS) device for measuring accelerations, angular rates, or for actuation comprises at least two substrates and at least one movable structure arranged in a cavity between the substrates. An electrically conducting frame surrounding the movable structure is arranged at an interface of the two substrates. The frame is electrically separated from the movable structure and connected by at least first and second electrically conducting connections to the first and second substrates, respectively. The frame may have a width of not more than 150 preferably not more than 50 μm. The first connection is at an interface between the frame and the first substrate. The second connection is a layer applied at an outer periphery of the frame and a peripheral face of the second substrate. The structure keeps electrical fields and electromagnetic disturbances away from the sensor and may also be used for shielding micro-electronic circuits.

Claims19

Dependent claims

A micro-electronic device, preferably a micro-electromechanical system (MEMS) device comprising

a) at least two substrates (5, 6),
b) a micro-electronic structure, preferably at least one movable structure in a MEMS-layer,
c) wherein said micro-electronic structure, preferably said movable structure (4.1, 4.2) is arranged in a cavity (8.1, 8.2) which is encapsulated between the at least two substrates (5, 6, 7),
d) an electrically conducting frame (1) surrounding said micro-electronic structure, preferably said movable structure (3.1, 3.2) and arranged at an interface of the two substrates (5, 6),
e) wherein the frame (1) is electrically separated from said micro-electronic structure, preferably form said movable structure (3.1, 3.2), and
f) the frame is electrically connected by at least a first and a second electrically conducting connection (13.1, 13.2, 13.3;
14) to said first (5) and second substrate (6), respectively,
g) wherein the first and second substrates and the frame all have a sufficient bulk conductivity to form a Faraday cage.

5 more elements

Dependencies are inferred from the claim text.