Power semiconductor structure with schottky diode and fabrication method thereof

A power semiconductor structure with schottky diode comprising:

• a silicon substrate;
• at least a polysilicon gate structure and a first polysilicon structure, located on the silicon substrate and separated by a predetermined distance;
• at least a body, located in the silicon substrate between the polysilicon gate structure and the first polysilicon structure and partially shielded by the first polysilicon structure;
• at least a source region, located in the body and partially shielded by the first polysilicon structure;
• a dielectric layer, covering the polysilicon gate structure and the first polysilicon structure, and having an open extending downward to the silicon substrate below the body, wherein the source region is adjacent to the open and a depth of the open is smaller than a greatest depth of the body;
• and
• a metal layer, filled in the open.