Liquid Crystal Display Device
AssigneeAltiam Services Ltd. LLC
InventorsJunichi Koike, Hideaki Kawakami
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Abstract
In a liquid crystal display (LCD) device having a thin film transistor (TFT), the TFT includes a source electrode, a drain electrode and a semiconductor layer. At least one of the source electrode and drain electrode includes a first layer including copper and a second layer forming an oxide layer and covering the first layer. The semiconductor layer has a substantially linear current-voltage relationship with said source electrode or drain electrode including said first and second layers, when a voltage is applied between the semiconductor layer and said source electrode or drain electrode.
Claims21
(canceled)
A thin film transistor comprising:
- a semiconductor layer;
- a first electrode comprising:
- a layer comprising copper, and
- an oxide layer in contact with the semiconductor layer;
- and
- a second electrode in contact with the semiconductor layer;
- wherein the semiconductor layer and the first electrode are configured to have a substantially linear current-voltage relationship when a voltage is applied between the semiconductor layer and the first electrode.
A method of forming a thin film transistor, comprising:
- depositing a gate electrode on a substrate;
- depositing a gate insulating layer over the substrate and the gate electrode;
- depositing a semiconductor layer over the gate insulating layer;
- forming a first electrode over at least a first portion of the semiconductor layer;
- forming a second electrode over at least a second portion of the semiconductor layer;
- and
- heating at least the first electrode to form a first oxidation layer on the first electrode, wherein the first oxidation layer is formed, at least in part, along the first portion of the semiconductor layer;
- wherein the semiconductor layer and the first electrode are configured to have a substantially linear current-voltage relationship when a voltage is applied between the semiconductor layer and the first electrode.
Dependencies are inferred from the claim text.