Apparatus for the thermal processing of a workpiece

Abstract

An apparatus for the thermal processing of a workpiece with a thermal processing tool that is adjustable perpendicularly to the workpiece surface has a drive for adjusting the work distance. The drive is in operative communication with the processing tool or part of it, and is configured as a voice coil actuator, comprising a magnet producing a magnetic field, and a coil in the magnetic field. The magnet and coil are movable relative to each other along a movement axis in response to an electric current. To provide a drive for a thermal processing machine that affords a compact structural form and high machine dynamics, the magnet has a cavity, which has arranged therein the processing tool, or a part thereof, which is mechanically connected to the voice coil actuator.

Dependencies are inferred from the claim text.