Chemical delivery system

A chemical delivery system, comprising:

• an enclosure;
• a first compartment disposed within the enclosure and having a plurality of first conduits to carry a first set of chemical species, the first compartment further having a first draw opening and a first exhaust opening to facilitate flow of a purge gas through the first compartment;
• a second compartment disposed within the enclosure and having a plurality of second conduits to carry a second set of chemical species, the second compartment further having a second draw opening and a second exhaust opening to facilitate flow of the purge gas through the second compartment, wherein the first set of chemical species is different than the second set of chemical species;
• and
• a third compartment disposed within the enclosure and having at least some of the plurality of first conduits and at least some of the plurality of second conduits originating in the third compartment and having a fitting to couple at least some first and second conduits to an external supply of at least some of the chemical species from the first and second sets, wherein the third compartment further includes a third draw opening and a third exhaust opening to facilitate flow of the purge gas through the third compartment, and wherein draw velocities of the purge gas through the second compartment and the third compartment are higher than the draw velocity of the purge gas through the first compartment.