Methods Of Removing Particles From Over Semiconductor Substrates
AssigneeMicron Technology, Inc.
InventorsNeil Joseph Greeley, Dan Millward, Wayne Huang
Life of this patent
Estimating the term…
Abstract
Some embodiments include methods of removing particles from over surfaces of semiconductor substrates. Liquid may be flowed across the surfaces and the particles. While the liquid is flowing, electrophoresis and/or electroosmosis may be utilized to enhance transport of the particles from the surfaces and into the liquid. In some embodiments, temperature, pH and/or ionic strength within the liquid may be altered to assist in the removal of the particles from over the surfaces of the substrates.
Claims15
1-13. (canceled)
A method of removing particles from over a surface of a semiconductor substrate, comprising:
- flowing a liquid across the surface and the particles, the liquid having thickness over the substrate, a first region of the thickness being near the substrate and being relatively static, a second region of the thickness being further from the substrate than the first region and having more flow than the first region;
- while the liquid is flowing, imparting an electric field across at least a region of the surface;
- and
- wherein the electric field causes forces on the particles which enhance transport of the particles from the first region to the second region.
20-27. (canceled)
A method of removing particles from surfaces of a plurality semiconductor substrates, comprising:
- placing the semiconductor substrates within a bath of flowing liquid;
- while the semiconductor substrates are within the bath, exposing the semiconductor substrate surfaces to varying conditions which include one or more of continuously varying temperature, continuously varying ionic strength, and continuously varying pH;
- and
- while the semiconductor substrate surfaces are exposed to the varying conditions, imparting at least one electric field to the surfaces;
- the electric field enhancing transport of particles from the surfaces into the liquid.
Dependencies are inferred from the claim text.