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US 2012/0266809 A1Published application
Insulation device of single crystal growth device and single crystal growth device including the same
OwnerSang-Hoon Lee, Hyun-Jung Oh +1inventors
InventorsSang-Hoon Lee, Hyun-Jung Oh, Il-Soo Choi
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Abstract
Provides are an insulation device of a single crystal growth device and a single crystal growth device including the same. The insulation device is installed inside a chamber of the single crystal growth device and the insulation device includes a plurality of insulation blocks that are spaced by a first distance.
Claims16
An insulation device installed inside a chamber of a single crystal growth device, the insulation device comprising:
- a plurality of insulation blocks that are spaced by a first distance.
A single crystal growth device comprising:
- a chamber including a heater;
- and
- an insulation device installed inside the chamber at one side of the heater, wherein the insulation device includes a plurality of insulation blocks spaced by a first distance.
Dependencies are inferred from the claim text.