Fluid bed reactor
AssigneeREC Silicon Inc
InventorsE. Wayne Osborne, Michael V. Spangler, Levic C. Allen, Robert J. Geertsen, Paul E. Ege, Walter J. Stupin, Gerald Zeininger
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AssigneeREC Silicon Inc
InventorsE. Wayne Osborne, Michael V. Spangler, Levic C. Allen, Robert J. Geertsen, Paul E. Ege, Walter J. Stupin, Gerald Zeininger
Estimating the term…
Fluidized bed reactor systems for producing high purity silicon-coated particles are disclosed. A vessel has an outer wall, an insulation layer inwardly of the outer wall, at least one heater positioned inwardly of the insulation layer, a removable concentric liner inwardly of the heater, a central inlet nozzle, a plurality of fluidization nozzles, at least one cooling gas nozzle, and at least one product outlet. The system may include a removable concentric sleeve inwardly of the liner. In particular systems the central inlet nozzle is configured to produce a primary gas vertical plume centrally in the reactor chamber to minimize silicon deposition on reactor surfaces.
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providing a bed of seed particles inside a gas-tight chamber defined within a vessel having (a) a top head, (b) a bottom head, (c) a generally tubular side wall that surrounds a generally vertically extending centerline, (d) a solitary central inlet nozzle having an opening that is upwardly facing, the solitary central inlet nozzle further comprising an inner wall and an outer wall positioned concentrically around the inner wall, (e) a plurality of fluidization nozzles, each fluidization nozzle having an opening that is upwardly facing and is located at an elevation below the elevation of the opening of the solitary central inlet nozzle;
A heated silicon deposition reactor system, comprising:
Dependencies are inferred from the claim text.