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US 2012/0258399 A1Published application
Radiation-sensitive resin composition, compound and producing method of compound
AssigneeJsr Corporation
InventorKen MARUYAMA
Life of this patent
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Abstract
A radiation-sensitive resin composition includes a compound shown by a following general formula (A), a solvent and a resin having an acid-labile group. Each of R1 and R2 independently represents a substituted or unsubstituted monovalent hydrocarbon group having 1 to 25 carbon atoms. Each of X and Z independently represents a substituted or unsubstituted divalent hydrocarbon group having 1 to 25 carbon atoms. Y represents a single bond or the like. n represents an integer from 0 to 5.
Claims9
A radiation-sensitive resin composition comprising:
- a compound shown by a following general formula (A);
- a solvent;
- and
- a resin having an acid-labile group,
- wherein
- each of R1 and R2 independently represents a substituted or unsubstituted monovalent hydrocarbon group having 1 to 25 carbon atoms,
- each of X and Z independently represents a substituted or unsubstituted divalent hydrocarbon group having 1 to 25 carbon atoms,
- Y represents a single bond or any one of groups shown by following formulas (1-1) to (1-6),
- and
- n represents an integer from 0 to 5.
7 more elements
A compound shown by a following general formula (A),
- wherein
- each of R1 and R2 independently represents a substituted or unsubstituted monovalent hydrocarbon group having 1 to 25 carbon atoms,
- each of X and Z independently represents a substituted or unsubstituted divalent hydrocarbon group having 1 to 25 carbon atoms,
- Y represents a single bond or any one of groups shown by following formulas (1-1) to (1-6),
- and
- n represent s an integer from 0 to 5.
3 more elements
A producing method of a compound, comprising:
- reacting a compound shown by a general formula (a1), a compound shown by a general formula (a2), and a compound shown by a general formula (a3),
- wherein
- each of X and Z independently represents a substituted or unsubstituted divalent hydrocarbon group having 1 to 25 carbon atoms,
- Y represents a single bond or any one of groups shown by formulas (1-1) to (1-6),
- each W independently represents a halogen atom,
- n represents an integer from 0 to 5, and
- each of R1 in the general formula (a2) and R2 in the general formula (a3) independently represents a substituted or unsubstituted monovalent hydrocarbon group having 1 to 25 carbon atoms.
4 more elements
Dependencies are inferred from the claim text.