Methods and apparatuses for roll-on coating
AssigneeDynamic Micro Systems, Semiconductor Equipment GmbH
InventorLutz Rebstock
Life of this patent
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Abstract
Coating rollers accepting liquid media provide liquid chemicals to substrates for depositing a thin coating layer on the flat substrates, such as semiconductors or panels. The liquid media is cooled to a life-preserving temperature while shielded from the thermal energy heating the substrates to prevent degrading the liquid media. Physical barrier or temperature barrier can be established in vicinities of the rollers to further limit exposing the liquid media to high temperature.
Claims20
A deposition system for coating a substrate, comprising:
- a heating mechanism to heat the substrate;
- one or more coating rollers, each roller comprising a porous layer for accepting and retaining a liquid to transfer to the substrate by rollingly contact;
- a temperature controlling device coupled to the liquid to control the liquid temperature to be below room temperature
An in-line deposition system for coating a substrate, comprising:
- one or more transport rollers for transport the substrate along the in-line deposition system;
- a substrate heater to heat the substrate;
- a liquid reservoir containing a liquid;
- a cooling device coupled to the liquid reservoir for cooling the liquid to below room temperature;
- one or more coating rollers, each roller comprising a porous layer contacting the liquid from the liquid reservoir to transfer the liquid to the substrate by rollingly contact.
A method comprising:
- providing rolling rollers having porous layers on surfaces;
- providing a container for containing a fluid, the rolling rollers contacting the fluid to transfer a fluid to the porous layer;
- isolating an area at a vicinity of the contact area between the roller and the fluid;
- heating the fluid inside the isolated area to a temperature at or above room temperature;
- cooling the fluid outside the isolated area to a temperature below room temperature;
- restricting fluid flow to the isolated area.
Dependencies are inferred from the claim text.