Cover structure for cryopump, cryopump, start-up method of cryopump, and storage method of cryopump
AssigneeSumitomo Heavy Industries, Ltd.
InventorHidekazu Tanaka
Life of this patent
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Abstract
A storage method of a cryopump is provided, the storage method including: closing, with a pump cover, a pump inlet in the cryopump for receiving gases to be pumped by the cryopump; and reducing a pressure in the cryopump through a fluid channel for communicating an interior of the cryopump to an exterior of the cryopump. A start-up method of a cryopump is also provided, the start-up method including releasing a negative pressure in the cryopump by removing a closing member from a cover main body of a pump cover mounted to the cryopump.
Claims5
A cover structure for maintaining an inside of a cryopump at a negative pressure, the cover structure comprising:
- a cover main body configured to close a pump inlet in the cryopump, the cover main body having a small hole for communicating the inside of the cryopump to an outside of the cryopump;
- and
- a closing member configured to close the small hole.
A storage method of a cryopump comprising:
- closing, with a cover, a pump inlet in the cryopump for receiving gases to be pumped by the cryopump;
- and
- reducing a pressure in the cryopump through a fluid channel for communicating an interior of the cryopump to an exterior of the cryopump.
Dependencies are inferred from the claim text.