Piezoelectric thin film resonator, filter, communication module and communication device
AssigneeTaiyo Yuden Co., Ltd.
InventorsTAKESHI SAKASHITA, MOTOAKI HARA, MASAFUMI IWAKI, TSUYOSHI YOKOYAMA, SHINJI TANIGUCHI, TOKIHIRO NISHIHARA, MASANORI UEDA
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Abstract
A piezoelectric thin film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least a portion of the upper electrode and that of the lower electrode oppose each other through the piezoelectric film, and at least a portion of the periphery of the upper electrode is reversely tapered.
Claims17
A piezoelectric thin film resonator comprising:
- a substrate;
- a lower electrode provided on the substrate;
- a piezoelectric film provided on the lower substrate;
- and
- an upper electrode provided on the piezoelectric film,
- wherein, at least a portion of the upper electrode and that of the lower electrode oppose each other through the piezoelectric film, and at least a portion of a periphery of the upper electrode has a reversely tapered shape.
A filter comprising a piezoelectric thin film resonator,
- wherein the piezoelectric thin film resonator includes:
- a substrate;
- a lower electrode provided on the substrate;
- a piezoelectric film provided on the lower substrate;
- and
- an upper electrode provided on the piezoelectric film,
- wherein, at least a portion of the upper electrode and that of the lower electrode oppose each other through the piezoelectric film, and at least a portion of a periphery of the upper electrode has a reversely tapered shape.
A communication module comprising a piezoelectric thin film resonator,
- wherein the piezoelectric thin film resonator includes:
- a substrate;
- a lower electrode provided on the substrate;
- a piezoelectric film provided on the lower substrate;
- and
- an upper electrode provided on the piezoelectric film,
- wherein, at least a portion of the upper electrode and that of the lower electrode oppose each other through the piezoelectric film, and at least a portion of a periphery of the upper electrode has a reversely tapered shape.
A communication device comprising a piezoelectric thin film resonator,
- wherein the piezoelectric thin film resonator includes:
- a substrate;
- a lower electrode provided on the substrate;
- a piezoelectric film provided on the lower substrate;
- and
- an upper electrode provided on the piezoelectric film,
- wherein, at least a portion of the upper electrode and that of the lower electrode oppose each other through the piezoelectric film, and at least a portion of a periphery of the upper electrode has a reversely tapered shape.
(canceled)
Dependencies are inferred from the claim text.