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US 2012/0256522 A1Published application
Magnetic sensor device, method of manufacturing the same, and magnetic sensor apparatus
AssigneeMurata Manufacturing Co., Ltd.
InventorsShigeo ITO, Yoshihiro Ito, Michio Kadota
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Abstract
A magnetic sensor device includes a piezoelectric substrate and an IDT electrode disposed on the piezoelectric substrate. At least a portion of the IDT electrode is made of a ferromagnetic metal and the duty ratio of the IDT electrode is higher than about 0.5 and lower than or equal to about 0.99.
Claims7
A magnetic sensor device comprising:
- a piezoelectric substrate;
- and
- an IDT electrode disposed on the piezoelectric substrate;
- wherein
- at least a portion of the IDT electrode is made of a ferromagnetic metal and a duty ratio of the IDT electrode is higher than about 0.5 and lower than or equal to about 0.99.
2 more elements
A method of manufacturing a magnetic sensor device comprising:
- a step of forming an IDT electrode which has a duty ratio that is higher than about 0.5 and lower than or equal to about 0.99 and at least a portion of which is made of a ferromagnetic metal on a piezoelectric substrate;
- and
- a heating step of performing a heating process after the step of forming of the IDT electrode.
Dependencies are inferred from the claim text.