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US 2012/0256519 A1Published application
Electromechanical transducer and method of producing the same
AssigneeCanon Kabushiki Kaisha
InventorsToshio Tomiyoshi, Kazutoshi Torashima, Takahiro Akiyama
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Abstract
An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less.
Claims14
An electromechanical transducer comprising:
- a substrate;
- a first electrode disposed on the substrate;
- and
- a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode, wherein
- the first electrode has a surface roughness value of 6 nm RMS (root-mean-square) or less.
2 more elements
A method of producing an electromechanical transducer, comprising:
- forming a first electrode on a substrate;
- forming a sacrificial layer film on the first electrode;
- forming a membrane on the sacrificial layer;
- forming a second electrode on the membrane;
- and
- forming an etching-hole in the membrane and removing the sacrificial layer through the etching-hole,
- wherein the first electrode is formed so as to have a surface roughness value of 6 nm RMS (root-mean-square) or less.
4 more elements
Dependencies are inferred from the claim text.