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AssigneesTaiwan TFT LCD Association, Chunghwa Picture Tubes, Ltd., Au Optronics Corporation, Toppoly Optoelectronics Corp., Chi Mei Optoelectronics Corp., Industrial Technology Research Institute, Hannstar Display Corp.
InventorsLin-En CHOU, Chia-Hao Tsai, Wen-Tung Wang
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A method for producing a thin film transistor and including the following steps for preparing a glass substrate; having a positive photosensitive coating on the glass substrate; providing a transparent mold plate, having a plurality of ladder opaque protrusions in accordance with a predetermined pattern having different depth; controlling the transparent mold plate downwardly to press into the positive photosensitive coating and non-contacting to the glass substrate; exposing a part of the positive photosensitive coating via an explosion by a UV light; remaining the other part of the positive photosensitive coating, which is shielded by the protrusions and shaped corresponding to the predetermined pattern; separating the transparent mold plate from the glass substrate, and removing the other parts of the photosensitive coating unshielded via a chemical solvent. Thereby, after the positive photosensitive coating is pressed, cured, and cleaned the thin film transistor is formed.
A thin film transistor comprising:
A thin film transistor comprising:
Dependencies are inferred from the claim text.