Semiconductor device
AssigneePanasonic Corporation
InventorsSatoru ITOU, Toshie Kutsunai
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Abstract
A semiconductor device has a first MIS transistor. The first MIS transistor includes a first source/drain region of a first conductivity type which includes a silicon compound layer causing a first stress in a gate length direction of a channel region in a first active region, and a stress insulating film which is formed on the first active region to cover a first gate electrode, a first sidewall, and the first source/drain region, and which causes a second stress opposite to the first stress. An uppermost surface of the silicon compound layer is located higher than a surface of a semiconductor substrate located directly under the first gate electrode. A first stress-relief film is formed in a space between the silicon compound layer and the first sidewall.
Claims15
A semiconductor device, comprising:
- a first MIS transistor, wherein
- the first MIS transistor includes
- a first gate insulating film formed on a first active region in a semiconductor substrate,
- a first gate electrode formed on the first gate insulating film,
- a first sidewall formed on a side surface of the first gate electrode,
- a first source/drain region of a first conductivity type which is formed in a trench provided in the first active region on a lateral side of the first sidewall, and which includes a silicon compound layer causing a first stress in a gate length direction of a channel region in the first active region, and
- a stress insulating film which is formed on the first active region to cover the first gate electrode, the first sidewall, and the first source/drain region, and which causes a second stress opposite to the first stress,
- an uppermost surface of the silicon compound layer is located higher than a surface of the semiconductor substrate located directly under the first gate electrode, and
- a first stress-relief film is formed in a space between the silicon compound layer and the first sidewall.
Dependencies are inferred from the claim text.