Semiconductor device and method for manufacturing the same
AssigneeElpida Memory, Inc.
InventorTomoyasu KAKEGAWA
Life of this patent
Estimating the term…
Loading patent…
AssigneeElpida Memory, Inc.
InventorTomoyasu KAKEGAWA
Estimating the term…
A method for manufacturing a semiconductor device includes: forming a first insulating film that covers a substrate; forming a conductive plug that penetrates the first insulating film; forming a hole portion on the conductive plug by partly removing upper part of the conductive plug, wherein the hole portion has a top surface of the conductive plug as a bottom surface, and has the first insulating film of a portion that covered the partly removed conductive plug as a sidewall; forming a sidewall insulating film that exposes a part of the bottom surface of the hole portion while covering the sidewall of the hole portion and a bottom portion of the hole portion; forming a variable resistance film that covers the sidewall insulating film and the bottom surface of the hole portion; and forming a conductive film that covers the variable resistance film.
A method for manufacturing a semiconductor device, comprising:
A semiconductor device comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.