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US 2012/0256097 A1Published application
Indirectly heated cathode cartridge design
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsCraig R. Chaney, Leo V. Klos, Anthony Renau, Alexander Perel
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Abstract
An apparatus and method for producing electrons in a plasma flood gun is disclosed. The apparatus includes an indirectly heated cathode (IHC) which is contained within a pre-fabricated cartridge. This cartridge can be readily replaced in a plasma flood gun. In addition, the use of an IHC reduces the amount of contaminants that are injected into the workpiece or wafer.
Claims12
A replaceable indirectly heated cathode (IHC) cartridge, comprising:
- a cylinder, having a bore therethrough;
- a filament positioned within said bore;
- a first insulating support holding said filament in said cylinder, while keeping said filament electrically insulated from said cylinder;
- and
- a cathode supported by said insulating support, such that said cathode is electrically insulated from said filament and said cylinder.
2 more elements
An ion implantation device, comprising
- an ion source;
- a magnet analyzer;
- at least one deceleration stage;
- magnet collimator;
- and
- a plasma flood gun, wherein said plasma flood gun further comprises an indirectly heated cathode (IHC) cartridge, adapted to generate and emit electrons toward a substrate.
3 more elements
Dependencies are inferred from the claim text.