Process For Plasma Treatment Employing Ceramic-Filled Polyamideimide Composite Parts
AssigneeQuadrant Epp AG
InventorsScott Howard Williams, Richard William Campbell, Stephan Glander
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Abstract
Internal components of plasma reactors are composed of a toleratable, ceramic filled plasma-useful polymer such as a high temperature engineering thermoplastic, preferably a polyamideimide. The parts exhibit a low erosion rate upon exposure to plasma at low pressure.
Claims22
In a plasma process wherein a plasma is generated within a reactor having a plurality of internal parts at sub-atmospheric pressure, the improvement comprising selecting as at least one internal part, a part manufactured from a toleratable ceramic-filled, plasma-useful polymer.
A plasma treating apparatus having a vacuum chamber adapted to receive a substrate to be plasma treated, and at least one apparatus component which is exposed to plasma in an interior of the apparatus, wherein the apparatus component is constructed of a toleratable ceramic-filled plasma-useful polymer.
Dependencies are inferred from the claim text.