Profile measuring apparatus, method for measuring profile, and method for manufacturing structure

A profile measuring apparatus which measures a profile of a measuring object, comprising:

• an irradiating unit which includes a light source and which is configured to irradiate the measuring object with light from the light source to form a spotted pattern;
• a scanner which is arranged in an optical path of the light irradiated from the irradiating unit to relatively scan a surface of the measuring object with the spotted pattern;
• a light receiver which includes a plurality of light-receiving pixels aligned to detect an image of the spotted pattern generated by the light irradiating the measuring object from a different direction different from an irradiation direction of the light irradiating the measuring object;
• a changing unit which is connected to the scanner and the light receiver to change a position, at which a signal of the light receiver utilized to detect a position of the image of the spotted pattern is obtained, according to the irradiation direction of the light;
• and
• a controller which is connected to the light receiver to calculate positional information of the measuring object based on the signal from the light receiver.