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US 2012/0238075 A1Published application
Coating apparatus and coating method
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsHidenori Miyamoto, Tsutomu Sahoda
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Abstract
A coating apparatus including a coating part which applies a liquid material containing an oxidizable metal and a solvent to a substrate; a chamber having a coating space in which the coating part applies the liquid material to the substrate and a transport space into which the substrate is transported; and a removal part which removes the liquid material from the atmosphere inside the chamber when a concentration of the solvent in the atmosphere inside the chamber exceeds a threshold value.
Claims20
A coating apparatus comprising:
- a coating part which applies a liquid material containing an oxidizable metal and a solvent to a substrate,
- a chamber having a coating space in which the coating part applies the liquid material to the substrate and a transport space into which the substrate is transported, and
- a removal part which removes the liquid material from the atmosphere inside the chamber when a concentration of the solvent in the atmosphere inside the chamber exceeds a first threshold value.
A coating method comprising:
- a coating step in which a liquid material containing an oxidizable metal and a solvent is applied to a substrate;
- and
- a removing step in which the liquid material is removed from the atmosphere inside a chamber having a coating space where the coating part applies the liquid material to the substrate and a transport space into which the substrate is transported when a concentration of the solvent in the atmosphere inside the chamber exceeds a first threshold value.
Dependencies are inferred from the claim text.