Radiation-sensitive resin composition, monomer, polymer, and production method of radiation-sensitive resin composition

A radiation-sensitive resin composition comprising:

• a polymer;
• a cation;
• and
• a solvent,
• wherein said polymer includes a following repeating unit represented by a general formula (I-a), a following repeating unit represented by a general formula (II-a), or a both thereof, and said cation is represented by a general formula (III),
• wherein
• each of R7 and R11 independently represents a hydrogen atom, a halogen atom, a cyano group, or a substituted or unsubstituted alkyl group,
• each of R8 to R10 independently represents a hydrogen atom, a hydroxyl group, a halogen atom, a nitro group, a carboxyl group, a substituted or unsubstituted alkyl group, a substituted or unsubstituted aralkyl group, or a substituted or unsubstituted alkoxy group,
• A represents —O— or —NR12—, wherein R12 represents a hydrogen atom, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted aryl group, and
• D represents a substituted or unsubstituted methylene group, a substituted or unsubstituted alkylene group, or a substituted or unsubstituted arylene group,
• wherein
• each of R1 to R3 independently represents a hydroxyl group, a halogen atom, a substituted or unsubstituted alkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkoxy group, —S—R6, or a group having two or more heteroatoms, wherein R6 represents a substituted or unsubstituted alkyl group, or a substituted or unsubstituted aryl group, and wherein at least one of R1 represents the group having two or more heteroatoms,
• l is an integer from 1 to 5, and
• each of m and n is independently an integer from 0 to 5.

A monomer represented by a following general formula (I-m) or a following general formula (II-m),

• wherein
• each of R1 to R3 independently represents a hydroxyl group, a halogen atom, a substituted or unsubstituted alkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkoxy group, —S—R6, or a group having two or more heteroatoms, wherein R6 represents a substituted or unsubstituted alkyl group, or a substituted or unsubstituted aryl group, and wherein at least one of R1 represents the group having two or more heteroatoms,
• l is an integer from 1 to 5,
• each of m and n is independently an integer from 0 to 5,
• each of R7 and R11 independently represents a hydrogen atom, a halogen atom, a cyano group, or a substituted or unsubstituted alkyl group,
• each of R8 to R10 independently represents a hydrogen atom, a hydroxyl group, a halogen atom, a nitro group, a carboxyl group, a substituted or unsubstituted alkyl group, a substituted or unsubstituted aralkyl group, or a substituted or unsubstituted alkoxy group,
• A represents —O— or —NR12—, wherein R12 represents a hydrogen atom, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted aryl group, and
• D represents a substituted or unsubstituted methylene group, a substituted or unsubstituted alkylene group, or a substituted or unsubstituted arylene group.

A polymer comprising:

• a following repeating unit represented by a general formula (I), a following repeating unit represented by a general formula (II) or a both thereof,
• wherein
• each of R1 to R3 independently represents a hydroxyl group, a halogen atom, a substituted or unsubstituted alkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkoxy group, —S—R6, or a group having two or more heteroatoms, wherein R6 represents a substituted or unsubstituted alkyl group, or a substituted or unsubstituted aryl group, and wherein at least one of R1 represents the group having two or more heteroatoms,
• l is an integer from 1 to 5,
• each of m and n is independently an integer from 0 to 5,
• each of R7 and R11 independently represents a hydrogen atom, a halogen atom, a cyano group, or a substituted or unsubstituted alkyl group,
• each of R8 to R10 independently represents a hydrogen atom, a hydroxyl group, a halogen atom, a nitro group, a carboxyl group, a substituted or unsubstituted alkyl group, a substituted or unsubstituted aralkyl group, or a substituted or unsubstituted alkoxy group,
• A represents —O— or —NR12—, wherein R12 represents a hydrogen atom, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted aryl group, and
• D represents a substituted or unsubstituted methylene group, a substituted or unsubstituted alkylene group, or a substituted or unsubstituted arylene group.

A production method of a radiation-sensitive resin composition, comprising:

• mixing a polymer and a solvent, the polymer comprising a following repeating unit represented by a general formula (I), a following repeating unit represented by a general formula (II), or a both thereof,
• wherein
• each of R1 to R3 independently represents a hydroxyl group, a halogen atom, a substituted or unsubstituted alkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted alkoxy group, —S—R6, or a group having two or more heteroatoms, wherein R6 represents a substituted or unsubstituted alkyl group, or a substituted or unsubstituted aryl group, and wherein at least one of R1 represents the group having two or more heteroatoms,
• l is an integer from 1 to 5,
• each of m and n is independently an integer from 0 to 5,
• each of R7 and R11 independently represents a hydrogen atom, a halogen atom, a cyano group, or a substituted or unsubstituted alkyl group,
• each of R8 to R10 independently represents a hydrogen atom, a hydroxyl group, a halogen atom, a nitro group, a carboxyl group, a substituted or unsubstituted alkyl group, a substituted or unsubstituted aralkyl group, or a substituted or unsubstituted alkoxy group,
• A represents —O— or —NR12—, wherein R12 represents a hydrogen atom, a substituted or unsubstituted alkyl group, or a substituted or unsubstituted aryl group, and
• D represents a substituted or unsubstituted methylene group, a substituted or unsubstituted alkylene group, or a substituted or unsubstituted arylene group.