Carbon material and method of manufacturing the same
AssigneeToyo Tanso Co., Ltd.
InventorsTakugo Ishii, Kaoru Setani, Hiroaki Matsunaga, Akiyoshi Takeda
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Abstract
When treated with a halogen gas, a carbon material can inhibit emission of an impurity after the treatment. A method of manufacturing the carbon material is also provided. A carbon material is subjected to an annealing process under a reduced pressure of from 1 to 10000 Pa in a H2 gas atmosphere at 500° C. to 1200° C. The duration of the annealing process is from 1 minute to 20 hours. This makes it possible to control the concentration of the halogen emitted, such as chlorine, to 5 ppb or less.
Claims9
1-6. (canceled)
A carbon material characterized in that the concentration of chlorine emitted therefrom is 5 ppb or less.
A method of manufacturing a carbon material, characterized by comprising subjecting a carbon substrate to an annealing process in a reducing gas atmosphere at from 500° C. to 1200° C.
Dependencies are inferred from the claim text.