# US 2012/0237733 A1 · Supporting membranes on nanometer-scale self-assembled films

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- Number: US 2012/0237733 A1
- Document ID: US20120237733A1
- Status: Published application
- Kind: A1
- Application number: 13/482,944
- Filed: 2012-05-29
- Published: 2012-09-20
- Earliest claimed: 2009-12-18
- Assignees: HGST Netherlands B.V.
- Inventors: Joan K. Bosworth; Elizabeth A. Dobisz; Ricardo Ruiz; Franck D. Rose dit Rose
- Web page: https://patentgrep.com/patent/US20120237733A1

## CPC

- G11B 5/82: Disk carriers
- B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
- B82Y 25/00: Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
- B82Y 30/00: Nanotechnology for materials or surface science, e.g. nanocomposites
- B82Y 40/00: Manufacture or treatment of nanostructures
- G11B 5/746: {Bit Patterned record carriers, wherein each magnetic isolated data island corresponds to a bit}
- Y10T 428/24355: Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
- Y10T 428/24504: Component comprises a polymer [e.g., rubber, etc.]
- Y10T 428/249953: Composite having voids in a component [e.g., porous, cellular, etc.]
- G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

Block copolymer lithography has emerged as an alternative lithographic method to achieve large-area, high-density patterns at resolutions near or beyond the limit of conventional lithographic techniques for the formation of bit patterned media and discrete track media. In one embodiment, a structure includes a plurality of nanostructures extending upwardly from a substrate and a porous membrane extending across upper ends of the plurality of nanostructures. Other systems and methods are disclosed as well.

## Claims

### Claim 1

A structure, comprising:
a plurality of nanostructures extending upwardly from a substrate; and
a porous membrane extending across upper ends of the plurality of nanostructures.

### Claim 2 (depends on 1)

The structure as recited in claim 1, wherein the nanostructures are oriented in a nonrandom pattern.

### Claim 3 (depends on 1)

The structure as recited in claim 1, further comprising a plurality of second nanostructures formed above the porous membrane, and a second porous membrane extending across upper ends of the plurality of second nanostructures.

### Claim 4 (depends on 3)

The structure as recited in claim 3, further comprising a plurality of third nanostructures formed above the second porous membrane, and a third porous membrane extending across upper ends of the plurality of third nanostructures.

### Claim 5 (depends on 1)

The structure as recited in claim 1, wherein an average width of the nanostructures is less than about 50 nm in a critical dimension thereof, wherein an average pitch of the plurality of nanostructures is within about 1.5 to about 3 times the average width in the critical dimension.

### Claim 6 (depends on 1)

The structure as recited in claim 1, wherein the nanostructures have an aspect ratio of thickness to width in a critical dimension of between about 0.5:1 and about 5:1.

### Claim 7 (depends on 1)

The structure as recited in claim 1, wherein the nanostructures are comprised of a block polymer film.