Tool For Harvesting Polycrystalline Silicon-coated Rods From A Chemical Vapor Deposition Reactor
AssigneeMEMC Electronic Materials, Inc.
InventorsRodolfo Bovo, Paolo Molino, Diego Gava
Life of this patent
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Abstract
A tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor includes a body including outer walls sized for enclosing the rods within the outer walls. Each outer wall includes a door for allowing access to at least one of the rods.
Claims16
A tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor comprising:
- a body including outer walls sized for enclosing the rods within the outer walls, and
- each outer wall including a door for allowing access to at least one of the rods.
A method of harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor having a reactor plate, the method comprising:
- positioning a harvesting tool atop the reactor plate, outer walls of tool being disposed outward of the rods,
- inserting forks into slots of the tool, and
- holding and detaching the rods form the reactor plate using the forks.
The method of claim 13 further comprising placing the harvesting tool on a revolving platform.
Dependencies are inferred from the claim text.