Method for in-situ doping of titanium dioxide film
OwnerZuruzi Bin Abu Samahinventor
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Abstract
A method of producing a titanium dioxide film with dopant uniformly dispersed throughout the entirety of the film The method involves deposition of dopant, concurrently or sequentially, with titanium before oxidation of the titanium. No separate doping step is required in this invention since the doping step occurs in-situ during oxidation process. The amount of dopant incorporated into a titanium dioxide film is controllable by varying the thickness and/or number of dopant layers deposited. Furthermore, dispersion of dopant throughout the titanium dioxide film is more uniform in this invention as multiple layers of dopant may be employed.
Claims20
A method of preparing a doped titanium dioxide film comprising the steps of:
- depositing a titanium and a dopant on a substrate to form a layer of said titanium intermixed with said dopant;
- oxidising said layer of said titanium intermixed with said dopant in an oxidant to form a titanium dioxide gel having said dopant dispersed throughout said titanium dioxide gel;
- and
- annealing said titanium dioxide gel to form said doped titanium dioxide film;
A titanium dioxide gel comprising:
- a layer of titanium dioxide;
- and
- a dopant dispersed throughout said layer of titanium dioxide.
Dependencies are inferred from the claim text.