Image creation method, substrate inspection method, non-transitory recording medium having program recorded thereon for executing image creation method or substrate inspection method, and substrate inspection apparatus
AssigneeTokyo Electron Limited
InventorsHiroshi Tomita, Kazuya Hisano, Tadashi Nishiyama
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Abstract
An image creation method of creating a filter image for removing a pseudo defect to inspect presence/absence of a defect on a substrate includes a filter image creation step of creating the filter image by replacing a picture element value of any one of picture elements located on a circumference of a circle about a center position of a registered image with a maximum value of picture element values of a plurality of picture elements selected from among the picture elements located on the circumference.
Claims11
An image creation method of creating a filter image for removing a pseudo defect to inspect presence/absence of a defect on a substrate, said method comprising:
- a filter image creation step of creating the filter image by replacing a picture element value of any one of picture elements located on a circumference of a circle about a center position of a registered image with a maximum value of picture element values of a plurality of picture elements selected from among the picture elements located on the circumference.
A substrate inspection method of inspecting presence/absence of a defect on a substrate, said method comprising:
- a removed image creation step of creating a removed image by subtracting a filter image created by an image creation method of creating a filter image for removing a pseudo defect to inspect presence/absence of a defect on a substrate, from an inspection image created based on an image obtained by imaging a substrate;
- and
- a judgment step of comparing picture element values of picture elements in the created removed image to a reference value, and judging that there is a defect on the substrate when the picture element value of any one of the picture elements is larger than the reference value,
- wherein said image creation method comprises a filter image creation step of creating the filter image by replacing a picture element value of any one of picture elements located on a circumference of a circle about a center position of a registered image with a maximum value of picture element values of a plurality of picture elements selected from among the picture elements located on the circumference.
A non-transitory computer-readable recording medium having a program recorded thereon for causing a computer to perform an image creation method of creating a filter image for removing a pseudo defect to inspect presence/absence of a defect on a substrate,
- said image creation method comprising:
- a filter image creation step of creating the filter image by replacing a picture element value of any one of picture elements located on a circumference of a circle about a center position of a registered image with a maximum value of picture element values of a plurality of picture elements selected from among the picture elements located on the circumference.
A non-transitory computer-readable recording medium having a program recorded thereon for causing a computer to perform a substrate inspection method of inspecting presence/absence of a defect on a substrate,
- said substrate inspection method comprising:
- a removed image creation step of creating a removed image by subtracting a filter image created by an image creation method of creating a filter image for removing a pseudo defect to inspect presence/absence of a defect on a substrate, from an inspection image created based on an image obtained by imaging a substrate;
- and
- a judgment step of comparing picture element values of picture elements in the created removed image to a reference value, and judging that there is a defect on the substrate when the picture element value of any one of the picture elements is larger than the reference value,
- wherein said image creation method comprises a filter image creation step of creating the filter image by replacing a picture element value of any one of picture elements located on a circumference of a circle about a center position of a registered image with a maximum value of picture element values of a plurality of picture elements selected from among the picture elements located on the circumference.
A substrate inspection apparatus for inspecting presence/absence of a defect on a substrate, said apparatus comprising:
- an image data obtaining part for imaging a substrate and obtaining image data to inspect presence/absence of a defect on the substrate;
- a filter image creating part for registering the obtained image data, and creating a filter image for removing a pseudo defect by replacing a picture element value of any one of picture elements located on a circumference of a circle about a center position of the image of the registered image data with a maximum value of picture element values of a plurality of picture elements selected from among the picture elements located on the circumference;
- a data creating part for performing polar coordinate transformation on position coordinates of picture elements in the image, and creating maximum value data indicating a relation between a radius of the circle about the center position of the image and a maximum value of picture element values of all of the picture elements located on the circumference of the circle;
- and
- a display part for displaying the filter image and the maximum value data created by said filter image creating part and said data creating part.
Dependencies are inferred from the claim text.