Processing an embedded metal film, and component with an embedded metal film
AssigneeBerliner Glas KGaA Herbert Kubatz GmbH & Co.
InventorJan INGWERSEN
Life of this patent
Estimating the term…
Abstract
A method for processing a metal film (1) embedded in a carrier (2) includes the step of heating the metal film (1) in such a way that the metal film (1) is transformed in a subregion into at least one insulator section (3). The metal film (1) is preferably locally heated by laser radiation (4). Also described is a component (10, 11, 12, 13) which is produced by the method and includes an electrostatic clamp, a drive mechanism which is adapted for moving a workpiece under the action of electrical fields, a resistor element or a display device, for example.
Claims15
A method for processing a metal film embedded in a carrier, comprising the step of heating the metal film in such a way that the metal film is transformed in a portion into at least one insulator section.
A component, comprising:
- a carrier made of a solid material, and
- a metal film embedded in the carrier and transformed in a portion into at least one insulator section.
Dependencies are inferred from the claim text.