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US 2012/0236437 A1Published application
Write pole fabricated using a carbon hard mask and method of making
AssigneeSeagate Technology LLC
InventorMichael Christopher Kautzky
Life of this patent
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Abstract
A magnetic writer comprises a write pole, a substrate and a non-magnetic, oxygen-free buffer material. The write pole has a leading edge, a trailing edge, a first side and second side. The substrate is at the leading edge of the write pole. The non-magnetic, oxygen-free buffer material is located between the write pole and the substrate, and the oxygen-free buffer material is selected from Re, Ru, Os, Rh, Ir, and combinations thereof.
Claims19
A magnetic writer comprising:
- a write pole having a leading edge side, a trailing edge side, a first side and a second side;
- a substrate at the leading edge side of the write pole;
- and
- a non-magnetic, oxygen-free buffer material located between the write pole and the substrate, the oxygen-free buffer material comprises Re, Ru, Os, Rh, Ir, or combinations thereof.
1 more element
A method of forming a magnetic writer, the method comprising:
- depositing a non-magnetic, oxygen-free buffer material on a substrate, the oxygen-free buffer material comprises Re, Ru, Os, Rh, Ir, or combinations thereof
- depositing a high moment magnetic material on the non-magnetic, oxygen-free buffer material, the magnetic material having a desired thickness for a write pole;
- depositing a hard mask on the magnetic material;
- forming a photoresist mask on the hard mask, the photoresist mask generally defining the desired shape of the write pole;
- patterning the hard mask using the photoresist mask;
- and
- forming the write pole by removing portions of the magnetic material and using the patterned hard mask as a pattern.
4 more elements
A magnetic writer comprising:
- a write pole having a trapezoidal shape at an air bearing surface;
- a substrate;
- a non-magnetic, oxygen-free buffer material located between the write pole and the substrate, the oxygen-free buffer material comprises Re, Ru, Os, Rh, Ir, or combinations thereof;
- a stop layer on an opposite side of the write pole as the non-magnetic, oxygen-free buffer material;
- and
- an insulator surrounding the write pole and the stop layer.
3 more elements
Dependencies are inferred from the claim text.