Spectral decomposition device and manufacturing the same

A spectral decomposition device, comprising

• a substrate stack in which an optical functional element comprising a spectrally decomposing effect and optics are formed such that in the substrate stack a convolved optical path is formed which extends between an optical entry window formed in the substrate stack, and an optical exit window formed in the substrate stack, wherein the spectral decomposition device additionally comprises an exit-side component which is mounted to the substrate stack such that it at least partially covers the optical exit window and which comprises a detector which is implemented to detect electromagnetic radiation propagating through the optical exit window along the convolved optical path, wherein a projection of a beam-blocking part of the exit-side component along a layer thickness direction to the substrate stack is spaced apart laterally from the optical entry window and an edge of the substrate stack.

A spectral decomposition device, comprising

• a substrate stack made of structured substrates in which a buried optical path space with an optical entry window and an optical intermediate window are defined;
• and
• a component with an optical functional element which is mounted to the substrate stack and which at least partially covers the optical intermediate window such that the optical functional element abuts on the buried optical path space via the optical intermediate window, and in the buried optical path space a convolved optical path forms which is defined by optics and an optical functional element comprising a spectrally decomposing effect and extends between the optical entry window and an optical exit window or a detector zone which is or are formed in the substrate stack, wherein the optical functional element is arranged at a bend of the convolved optical path and forms a first part of the optics, while a second part of the optics is formed in the substrate stack or comprises the optical functional element comprising a spectrally decomposing effect.

A method for manufacturing a spectral decomposition device, comprising:

• manufacturing a plurality of substrate stacks from structured substrates in which a buried optical path space is defined, wherein the optical path space comprises at least one window;
• and
• subsequent substrate stack-individual mounting of a component to the substrate stacks so that the respective component at least partially covers the at least one window, and so that an optical functional element comprising the component is adjacent to the buried optical path space via the at least one window in the substrate stack and helps to define a convolved optical path which forms in the buried optical path space and is defined by optics and an optical functional element comprising a spectrally decomposing effect, which are formed in the respective substrate stack with the mounted component.

A method for manufacturing a spectral decomposition device, comprising:

• manufacturing a plurality of substrate stacks in each of which an optical functional element comprising a spectrally decomposing effect and an optics are formed such that in the optical path space a convolved optical path is formed which extends from an optical entry window formed in the respective substrate stack to an optical exit window or a detector zone which is formed by the substrate stack, in substrate stack parts each comprising disjunct amounts of substrates of the respective substrate stack and which may each be combined into a respective substrate stack, wherein an optical entry aperture and/or an optical exit aperture is formed in a substrate stack part of the respective substrate stack in which neither the optical functional element comprising a spectrally decomposing effect nor the optics is formed;
• and
• subsequent substrate stack-individual connecting of the substrate stack parts into a respective substrate stack.