US 2012/0236379 A1 · LADAR USING MEMS SCANNING

Abstract

A scanning mirror includes a substrate that is patterned to include a mirror area, a frame around the mirror area, and a base around the frame. A set of actuators operate to rotate the mirror area about a first axis relative to the frame, and a second set of actuators rotate the frame about a second axis relative to the base. The scanning mirror can be fabricated using semiconductor processing techniques or processing methods that do not require clean room process. Drivers for the scanning mirror may employ feedback loops that operate the mirror for triangular motions. Some embodiments of the scanning mirror can be used in a LADAR system for a Natural User Interface of a computing system.

Claims18

Dependent claims

A scanning mirror system comprising:

a substrate patterned to include a mirror area, a frame around the mirror area, and a base around the frame;
a first actuator coupled such that operation of the first actuator rotates the mirror area about a first axis relative to the frame;
and
a second actuator coupled such that operation of the second actuator rotates the frame about a second axis relative to the base.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

13/216,156Filed 23 Aug 2011

Priority

23 Aug 2010

Published

20 Sep 2012

Term ends

Not estimatedThe source records don’t support an estimate.

Classification6 codes

G02B 26/101
Scanning systems: with both horizontal and vertical deflecting means, e.g. raster or XY scanners
G01S 7/4817
Constructional features, e.g. arrangements of optical elements: relating to scanning
G02B 26/0841
The reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD: the reflecting element being moved or deformed by electrostatic means
G02B 26/105
Scanning systems: with one or more pivoting mirrors or galvano-mirrors

Ladar using mems scanning

Life of this patent

Ladar using mems scanning

Life of this patent

Abstract

Claims18